Description
SQ-8 MicroCoat is an epoxy-based negative photoresist designed for thin films ranging from 50 nm to 4 μm in thickness. SQ-8 MicroCoat is optimized to reduce dark field loss in thin film lithography increasing the resolution limits of the intended patterned features. Similar to SU-8 6000.
Sensitive to NUV, i-line and broadband wavelengths. SQ-8 uses superior epoxies specially designed for the electronics industry, making improvements in optical transparency, particles and filter-ability, cured surface energy consistency, and photoresist lot-to-lot consistency versus industry competitors.
Key features
- Tone: Negative
- Exposure: NUV, i-line, broadband
- Film thickness: 0.05 - 2 µm
- Developer: SQ-8 Developer, SU-8 PGMEA
- Performance: High-res for ultra-thin films
- Drop-in Replacement for: SU-8 TF 6000 Series
Check out the differences between SQ-8 Negative Resist offerings here!
